Chinese semiconductor manufacturing equipment makers have begun producing immersion deep ultraviolet (DUV) lithography machines and are developing prototypes of the more advanced extreme ultraviolet (EUV) lithography machines, The Information reported on July 27.

China: Mass Production of Immersion DUV Lithography Machines Begins

China: Mass Production of Immersion DUV Lithography Machines Begins | RANE

China

Environment, Science & Technology

Chinese semiconductor manufacturing equipment makers have begun producing immersion deep ultraviolet (DUV) lithography machines and are developing prototypes of the more advanced extreme ultraviolet (EUV) lithography machines, The Information reported on July 27. 

SITUATION REPORT

China: Mass Production of Immersion DUV Lithography Machines Begins

Subscribe to view this article